Precision Parts Cleaning

TMPI's reputation for excellence rests on over 50 years of Ultra High Vacuum expertise. We specialize in decontaminating, refurbishing, and cleaning OEM process tool components for the following applications:

  • Physical Vapor Deposition (PVD)
  • Chemical Vapor Deposition (CVD)
  • Etch
  • Ion Implant
  • Thin Film
  • Metrology
  • Photo Lithography
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Our processes meet or exceed the most stringent requirements in the industry

  • Class 100 Clean Room
  • In-House Laboratory
  • Surface Analysis
  • ISO 9001: 2015 Certified

Refurbishment Services (outsourcing certain services)

  • CO2 Cleaning
  • Twin Wire Arc Spray (TWAS)
  • De-burring
  • Decontamination
  • Fabrication and Spares

Analytical Services

  • Liquid Particle Count
  • Non-Volatile Residue
  • ICPMS
  • SEM

Coatings & Plating

  • Arc Spray Coating Services
  • Hard Chrome Plating Services
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Cleaning and Monitoring Capabilities

Monitoring & Analytical Capabilities

  • Particle Count: On surfaces, airborne, in liquids Available particle testers: Met1, Q III, Fluke 983
  • Smallest Channel: 0.3 micro meter, CLS700: Smallest channel: 0.2 micro meter
  • Swipe/Free Iron Test
  • Visual Inspection: Microscopic, Bright Light, Black Light, Auxiliary optical tools for estimating particles and scratch size

Aqueous Cleaning

  • 18 Mega Ohm DI Water for process set-up and rinse
  • Acidic, Neutral, and Alkaline Detergents
  • Na-Free Detergent
  • Pressure Washers and UltraSonic / MegaSonic Capabilities

Precision Parts Cleaning Capabilities

Clean Room

  • Class 100
  • Class 1000
  • Nitrogen Purged Ovens
  • Dark Room (UV Light Inspection)

Chemical Cleaning Process

  • Degreasing
  • Ultrasonic
  • Stripping
  • Selective Etching
  • Oxidizing & Reducing Agents
  • Alkali/Acid Etchants
  • Deionized Water Rinse (Class 1000)

High Pressure Cleaning

  • Various Degreasing Agents (Customer Request)

Deionized Rinse

  • 18 MΩ, Ambient/Hot

Testing

  • Liquid Particle Count
  • Non Volatile Residue (NVR)
  • Water Break
  • Swipe/Optical Counting of Particles
  • Free Iron Test
  • Particle Flow Test
  • Insulation Resistance

Available Packaging Materials

  • Ultra-Low Outgassing Polyethylene (ULO)
  • Nylon
  • UHV Foil
  • Lint Free Cloth
  • Aluminum Barrier Foil

Mechanical Cleaning Process

  • High Pressure
  • Precision Bead Blasting
  • CO2/Snow cleaning
  • Abrasives with Chemically Neutral Agents

Type of Cleaning

  • Chemical and Mechanical
  • Aqueous
  • Solvent
  • Ultrasonic/Megasonic
  • High Pressure

 

Surface Texture

  • Achievable Roughness Average (Ra): 50-600 um/in

Chemical Analytic Laboratory

  • PhD Chemist, AA, Tank Monitoring, Process Control

Inspection Capabilities

  • Multiple Gates (Incoming, Production, Final)
  • UV Light / Darkroom
  • Visual
  • Cosmetic
  • Microscope(up to 200x)
  • Endoscope